Efforts of research and developments

Adopted to: 『Product development support subsidies for Monozukuri (manufacturing) SMEs』 of National Federation of Small Business Associations

Title of the research

Prototype development of grinding and polishing ultra thinning process for hard-to-cut material wafers (GaAs、LT)such as high hardness and high vulnerability. (P2131700127)

Business operators

Enzan Seisakusho Co, Ltd.

Researchers

Takashi Sato, Takashi Furuya, Kazunari Yokoyama

Overview of the research

It is now an issue to thin electronic parts that are mounted on various devices such as portable terminals and digital devices because these devices are becoming smaller and higher performance. Accordingly; we aim to satisfy the customers’ demand (cost and quality) by developing grinding and polishing techniques of the difficult abrasives such as lithium tantalate and GaAs which have bumpy surfaces and have solder balls by upgrading the cutting (grinding and polishing) process technology which will make the ultra-thinning process possible which will then provide the developed ultra-thinning process to brand manufacturers.

Research year

2009

Adopted to 『Monozukuri (manufacturing product) development and research subsidies』 of Yamanashi Industry Support Organization

Title of the research

Development of thin wafers with solder bumps

Business operators

Enzan Seisakusho Co.,Ltd.

Researchers

Takashi Sato, Takashi Furuya, Kazunari Yokoyama

Overview of the research

We are adept at processing the back side of the semiconductor wafer and given a contract for the processing of a wide variety of semiconductor wafers from major wafer manufacturers. Our established thinning process is able to mass produce and can process surface bumps about 20μm and thickness up to 30μm, and we believe we are one step ahead for processing stability, versatility and quality compared to the other processing manufacturer. Currently; there are many requests for processing thinner wafers and surface bumps over 80μm. We research and develop technologies that meet the needs by extending our established stable process in mass production.

Research year

2009

Adopted to 『Support project for sophisticating strategic base technology 』 of Ministry of Economy, Trade and Industry

Title of the research

Development of laser dicing technology that corresponds to the next-generation electronic devices (Kanto 0608031-3)

Research manager

Yamanashi Industry Support Organization

Researcher group

University of Yamanashi, Yamanashi Industrial Technology Center, Enzan Seisakusho Co, Ltd.

Researchers

University of Yamanashi, :Harimoto (Associate Professor),
Yamanashi Industrial Technology Center: Kiyotoshi Takao and Toshiyasu Komatsu,
Shinshu University: Takashi Hosono (Assistant teacher)
Enzan Seisakusho Co. Ltd.: Hiroshi Matsuzaka・Kohei Yamada・Takashi Sato・Kazunari Yokoyama and Masanori Dobashi

Overview of the research

Realization of the dry process by laser with high-precision and high-speed was required because conventional semiconductor wafer cutting process by rotating blades had big problems with damaged chips from the cutting vibration and also a low yield rate with having a wide cutting width. Accordingly: developing laser dicing technology for practical use by creating a prototype experimental device that generated a variety of laser beams and established an ideal processing condition and controlling technique of the laser beams using the device.

Research year

2007~2009

Adopted to 『Development and research subsidies project』of Yamanashi Industry Support Organization

Title of the research

[Development of dicing technique of Si by using laser]

Business operators

Enzan Seisakusho Co, Ltd.

Researchers

Takashi Sato, Kokei Yamada, Masanori Dobashi

Overview of the research

We had an advanced mass production and technological development of conventional rotating blades processing system. However, we realized the limitations of it and started developing a new laser dicing technology. The purpose of this research project is to examine technology to reduce debris (adhesion of molten refuse) which occurs in the laser dicing process and make it applicable to mass production.

Research year

2006

Entrusted with 『Dragon gate project 』support of : The Kofu Chamber of Commerce & Industry

Dragon gate project

This is the generic name of the industry-academia collaboration support project managed by the Kofu Chamber of Commerce & Industry. Support for a variety of attempts for leading new manufacturing while taking advantage of the seeds at Yamanashi University.

Support content

We can receive advice from the professional of TLO in Yamanashi for free. Funds for market research to make practical use of technology and incubation facilities in Yamanashi University as a research space for 3 years.

Research task

(1)Make laser dicing process applicable to mass production.
 (Establish conditions of using YAG laser)
(2)Examination for applying fem to second laser in dicing.

Research term

3 years (April 2006 ~ March 2008)

Acquisition of authorization for 『 Specific research and development project based on the law article 4 paragraph 1 concerning sophisticating basic manufacturing technology of SMEs』of Ministry of Economy, Trade and Industry

Title of the research

[Development of laser dicing technology that corresponds to the next-generation devices]

Business operators

Enzan Seisakusho Co,Ltd.

Researchers

Takashi Sato, Kokei Yamada, Masanori Dobashi

Overview of the research

Research and development of the laser dicing technique that uses a laser beam for high yield rate by reducing cutting width. Initially establish an ideal process condition and control technology of the laser beams and then research for practical use by using the laser dicer that loads the technology.

Entrusted with 『Emphasis support for local SMEs』 of Yamanashi Industrial technology center

Technical issues

Dicing technology by using YAG laser

Support term

Dec 2nd 2005 ~ Feb 17th 2006

Support cooperator

Yamanashi Industrial Technology Center
 Advanced Technology Development Dept.: Shinichi Nakayama

Adopted to 『Expense support project for creative technology research and development in Yamanashi』

Title of the research

[Development of the back side thinning process and dicing & dividing process for thin IC chip with thickness 20μm and size of 150μm square.]

Business operators

Enzan Seisakusho Co.Ltd.

Researchers

Takashi Sato, Tokuo Naito, Yoshimori Hara, Hideki Takekawa

Overview of the research

Take measure of the limit for minimum cutting width of conventional dividing method (dicing) and then develop a process to reduce cutting width with make a prototype by laser and etching as a new type of dividing method. At the same time, develop thinning process to make IC chip thickness 20μm as a thinning prototype in addition to the conventional method and establish a process development of an ideal thin IC chip with combination of the dividing method described above.

Research year

2005

Acquisition of 『 authorization of article 4 paragraph 3 on the Act on Temporary Measures concerning the Promotion of the Creative Business Activities of SMEs』

Title of the research

[Development of the back side thinning process and dicing & dividing process for thin IC chip with thickness 20μm and size of 150μm square.]

Business operators

Enzan Seisakusho Co.Ltd.

Researchers

Takashi Sato, Tokuo Naitou, Yoshimori Hara, Hideki Takekawa

Overview of the research

It is expected to have an increase in requests for applications with personal or thing identifier such as IC card, IC credit card, IC bank card and IC paper money to prevent forgery in the contemporary network age. Creating inexpensive chips and processing thin IC chips that are implantable into thin things such as cards and paper money to meet these requests will become an issue. For the purpose of solving this issue: develop a process that can cut small IC chip with divided areas of 10μm with a reduction in cost and develop IC chip with thickness 20μm that is implantable into thin things. Development plan is a total of 3 years, 1st year: research and basic experiment, 2nd year: establish a new process, 3rd year: establish a process for applicable mass production.

Research year

2005

Adopted to 『Research and development project for practical use of business creation from university (feasibility study project)』of NEDO

Title of the research

[The feasibility study related to high density via hole process that correspond to millimeter-wave device]

Business operators

Enzan Seisakusho Co.Ltd.

Researchers

Yamanashi Graduate School for Material Engineering of Medicine and Engineering Research Section : Shun Matsumoto
Takashi Sato, Kazuhisa Tukahara

Overview of the research

Research on research and development of via hole processing technology to meet the demand of high frequency, high-power and densification for wireless telecommunications devices. Establish a concrete process of etching technology that refers hydrogen plasma based on the crystal defect repair technology of compound semiconductor at University of Yamanashi and survey the superiority of it to other technological processes at the same time. In order to increase the compatibility of this technology, we must research the integrity of the other technical elements of the
manufacturing process for integrated circuit that is incorporating it with this technology.

Research year

2003

* About『Research and development project for practical use of business creation from university』
This is conducted by New Energy and Industrial Technology Development Organization (NEDO) for the purpose of creating new jobs in the industry by promoting commercialization of the research results at University. There is a Feasibility Study Project (F/S) and a Research and Development Project (R&D) for the matching fund project. The Feasibility Study Project (F/S) supports the feasibility study to decide the possibility of the project before Research and Development Project (R&D) only if the private business operator is a SME. Research and Development Project (R&D) utilizes university research results and promote commercializing it by private business operators by supporting the research and development and searching the possibility of commercializing the industry-academia collaboration.

Adopted to 『Expenses support project for creative technology research and development in Yamanashi』

Title of the research

[Establishment of a processing method for tip shape (V groove shape) of thin blade grinding stone]

Business operators

Enzan Seisakusho Co.Ltd.

Researchers

Norihide Matsuzaka

Overview of the research

There is not only a requirement for the cutting process during the dicing process; but there is an increase requirement for creating a V groove shape. However it is difficult to process this stably with the current processing method. Therefor;e truing the grinding wheel has become necessary during processing. To meet these requirements we established the precision truing techniques.

Research year

1998